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special coating

special coating

What is the coating?Main coating technologyPicture of coating application

What is the coating?

Coating refers to the necessary process of stabilizing process conditions and extending product life by applying special coating treatment on the surface of equipment accessories. Provide various coating technologies that best suit customer processes, suppress particle occurrence and surface damage, stabilize machine room conditions, thereby extending product life, improving productivity and operating rate, and contributing to cost savings for customers.

Types of Coating Technology

Anodizing
(Bipolar oxide coating)

Anodizing (Bipolar oxide coating)

The technology of forming a solid alumina film (Al2O3) on the surface of aluminum through the electrochemical reaction of aluminum (AI) and oxygen (O).

Thermal Spray Coating
(Thermal spray coating)

Thermal Spray Coating (Thermal spray coating)

The technology of using hot melt coating materials to spray onto the surface of accessories to form a coating film.

Main coating technology

Coating technology can be distinguished based on coating process and physical properties. In order to cope with the new generation of technologies below 10nm from customer companies, our company continuously develops exclusive coating technologies

ceramic coating

category Plasma spraying
Y203 FineCera™ SF™
purpose By endowing semiconductor accessories with plasma resistance characteristics, controlling the occurrence of particles and achieving process stabilization
Main features Excellent plasma resistance characteristics Control the occurrence of particles through process reactions By reducing process gas
Reaction between body and coating
Process changes should be controlled
Hardness(Hv) 400 ~ 450 300 ~ 350 350 ~ 450
Volume resistance(Ωcm) E+11~12 E+10~11 E+10~11
Operating rate(%) 3 ~ 5 < 2 < 3
Cross section view

metallic coating

category plasma spray
ARC SurfTex-1 SurfTex-2
purpose Improving particle control by increasing the adhesion between the base material and the Arc coating surface
Main Features Guide Byproduct to stabilize Depo Particle and Peel off control effects are consistent By forming a pattern to increase pollutant Depo,
Thereby extending the P.M cycle
Adhesion(Mpa) 15 ~ 18 > 27 -
Bare comparison
Increase rate of surface area (%)
2% - 12%
picture

Anodization

category Bipolar oxidation
Sulfuric acid oxidation Oxalic acid oxidation
Purpose of use Provide insulation function to semiconductor accessories to protect their appearance
Main characteristics Excellent hardness and insulation resistance Excellent corrosion resistance
Hardness (Hv) 400~500 350~400
Volume resistance (Ω cm) E+9 ~ 10 E+9 ~ 10
picture

MorePicture of coating application

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